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Unique high quality characterization at LFI

  • Thickness, n,k, gradient, carrier density, mobility

    • Single layer 1nm-10,000nm​

    • Multiple layer stacks analysis​​​

  • Uniquely High Accuracy

    • combined SE(Spectroscopic Ellipsometry) with T (Transmittance) could significantly improve the accuracy.​​

  • More information can be characterized uniquely by more experimental measurements

  • SE + Trans. + Refl.(film side) + Refl.(glass side) + sheet resistance

    • Gradient

    • Electron density, electron mobility, electron scattering time

    • Binary materials composition could be estimated​​

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